HITACHI-TM3000
Hitachi TM3000
- Thermionic-type filament
- Acc. Voltage: 5 kV or 15 kV
- Magnification: 15x - 30 000x
- Option: Bruker Quantax 70 EDS (Resolution: 135eV, Detectable from boron)
JEOL JSM-7401F specifications
JEOL JSM-7401F
- Cold FEG
- Acc. Voltage: 0.1 ~ 30 kV
- Maximum current: 2nA
- Resolution = 1.0 nm (15 kV), 1.5 nm (1kV)
- Option: EDS (Resolution 137eV, Detectable Z≥B), STEM
JEOL JSM-7000F specifications
JEOL JSM-7000F
- Schottky-type FEG
- Acc. Voltage: 0.5 ~ 30 kV
- Maximum current: 200nA
- Resolution = 1.2nm (30kV), 3.0nm (1kV)
- Option: BSE, EDS (Resolution: 137eV, Detectable Z≥B), WDS (Detectable range: 0.17eV-10.8eV)